Charged-Particle Beam Device and Cross-Sectional Shape Estimation Program

Charged-Particle Beam Device and Cross-Sectional Shape Estimation Program

The objective of the present invention is to use brightness images acquired under different energy conditions to estimate the size of a defect in the depth direction in a simple manner. A charged-particle beam device according to the present invention determines the brightness ratio for each irradia...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: KAWANO, Hajime, YOKOSUKA, Toshiyuki, KUROSAWA, Kouichi, KAZUMI, Hideyuki
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator KAWANO, Hajime
YOKOSUKA, Toshiyuki
KUROSAWA, Kouichi
KAZUMI, Hideyuki
description The objective of the present invention is to use brightness images acquired under different energy conditions to estimate the size of a defect in the depth direction in a simple manner. A charged-particle beam device according to the present invention determines the brightness ratio for each irradiation position on a brightness image while changing parameters varying the signal amount, estimates the position of the defect in the depth direction on the basis of the parameters at which the brightness ratio is at a minimum, and estimates the size of the defect in the depth direction on the basis of the magnitude of the brightness ratio (see FIG. 5).
format Patent
fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US2021366685A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US2021366685A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US2021366685A13</originalsourceid><addsrcrecordid>eNqNyr0KwjAUhuEsDqLewwHngm2xdNVa0a0Qncsh_WwD-SMJXr8IXoDTCw_vWty7heOMqRg4Zq0M6Ay2dMFbKxC7ibroUyokVNbesSG5cAD1KWvLX6Ih-jmy3YrVi03C7teN2F_7R3crEPyIFFjBIY9PWR2qsm6apj2eyvq_6wM9ADTY</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Charged-Particle Beam Device and Cross-Sectional Shape Estimation Program</title><source>esp@cenet</source><creator>KAWANO, Hajime ; YOKOSUKA, Toshiyuki ; KUROSAWA, Kouichi ; KAZUMI, Hideyuki</creator><creatorcontrib>KAWANO, Hajime ; YOKOSUKA, Toshiyuki ; KUROSAWA, Kouichi ; KAZUMI, Hideyuki</creatorcontrib><description>The objective of the present invention is to use brightness images acquired under different energy conditions to estimate the size of a defect in the depth direction in a simple manner. A charged-particle beam device according to the present invention determines the brightness ratio for each irradiation position on a brightness image while changing parameters varying the signal amount, estimates the position of the defect in the depth direction on the basis of the parameters at which the brightness ratio is at a minimum, and estimates the size of the defect in the depth direction on the basis of the magnitude of the brightness ratio (see FIG. 5).</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRICITY</subject><creationdate>2021</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20211125&amp;DB=EPODOC&amp;CC=US&amp;NR=2021366685A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76419</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20211125&amp;DB=EPODOC&amp;CC=US&amp;NR=2021366685A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>KAWANO, Hajime</creatorcontrib><creatorcontrib>YOKOSUKA, Toshiyuki</creatorcontrib><creatorcontrib>KUROSAWA, Kouichi</creatorcontrib><creatorcontrib>KAZUMI, Hideyuki</creatorcontrib><title>Charged-Particle Beam Device and Cross-Sectional Shape Estimation Program</title><description>The objective of the present invention is to use brightness images acquired under different energy conditions to estimate the size of a defect in the depth direction in a simple manner. A charged-particle beam device according to the present invention determines the brightness ratio for each irradiation position on a brightness image while changing parameters varying the signal amount, estimates the position of the defect in the depth direction on the basis of the parameters at which the brightness ratio is at a minimum, and estimates the size of the defect in the depth direction on the basis of the magnitude of the brightness ratio (see FIG. 5).</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRICITY</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2021</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNyr0KwjAUhuEsDqLewwHngm2xdNVa0a0Qncsh_WwD-SMJXr8IXoDTCw_vWty7heOMqRg4Zq0M6Ay2dMFbKxC7ibroUyokVNbesSG5cAD1KWvLX6Ih-jmy3YrVi03C7teN2F_7R3crEPyIFFjBIY9PWR2qsm6apj2eyvq_6wM9ADTY</recordid><startdate>20211125</startdate><enddate>20211125</enddate><creator>KAWANO, Hajime</creator><creator>YOKOSUKA, Toshiyuki</creator><creator>KUROSAWA, Kouichi</creator><creator>KAZUMI, Hideyuki</creator><scope>EVB</scope></search><sort><creationdate>20211125</creationdate><title>Charged-Particle Beam Device and Cross-Sectional Shape Estimation Program</title><author>KAWANO, Hajime ; YOKOSUKA, Toshiyuki ; KUROSAWA, Kouichi ; KAZUMI, Hideyuki</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US2021366685A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2021</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRICITY</topic><toplevel>online_resources</toplevel><creatorcontrib>KAWANO, Hajime</creatorcontrib><creatorcontrib>YOKOSUKA, Toshiyuki</creatorcontrib><creatorcontrib>KUROSAWA, Kouichi</creatorcontrib><creatorcontrib>KAZUMI, Hideyuki</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>KAWANO, Hajime</au><au>YOKOSUKA, Toshiyuki</au><au>KUROSAWA, Kouichi</au><au>KAZUMI, Hideyuki</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Charged-Particle Beam Device and Cross-Sectional Shape Estimation Program</title><date>2021-11-25</date><risdate>2021</risdate><abstract>The objective of the present invention is to use brightness images acquired under different energy conditions to estimate the size of a defect in the depth direction in a simple manner. A charged-particle beam device according to the present invention determines the brightness ratio for each irradiation position on a brightness image while changing parameters varying the signal amount, estimates the position of the defect in the depth direction on the basis of the parameters at which the brightness ratio is at a minimum, and estimates the size of the defect in the depth direction on the basis of the magnitude of the brightness ratio (see FIG. 5).</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language eng
recordid cdi_epo_espacenet_US2021366685A1
source esp@cenet
subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
title Charged-Particle Beam Device and Cross-Sectional Shape Estimation Program
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-08T02%3A32%3A35IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=KAWANO,%20Hajime&rft.date=2021-11-25&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS2021366685A1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true