AXIAL ALIGNMENT ASSEMBLY, AND CHARGED PARTICLE MICROSCOPE COMPRISING SUCH AN ALIGNMENT ASSEMBLY

An axial alignment assembly (100) comprising a first body and a second body. The first body has a substantially cylindrical outer jacket, and has a first alignment axis. The second body comprises a substantially cylindrical inner jacket, and has a second alignment axis. The second body is positioned...

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Bibliographische Detailangaben
Hauptverfasser: Smit, Casper Maria, Dona, Pleun
Format: Patent
Sprache:eng
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