TESTING SYSTEM AND TESTING METHOD
This testing system comprises a prober, a tester, a prober control unit for controlling the prober, and a tester control unit for controlling the tester, wherein the tester control unit causes the tester to execute a test which is composed of a plurality of parts on a device to be tested formed on a...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | This testing system comprises a prober, a tester, a prober control unit for controlling the prober, and a tester control unit for controlling the tester, wherein the tester control unit causes the tester to execute a test which is composed of a plurality of parts on a device to be tested formed on a test body in addition to acquiring an estimated test ending time when the test has reached a predetermined stage, and sends a control signal to the prober control unit so as to transfer the test body into a testing chamber housing the tester before the estimated test ending time. |
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