Method of Manufacturing A Semiconductor Transducer Device With Multilayer Diaphragm And Semiconductor Transducer Device With Multilayer Diaphragm

In an embodiment a method includes providing a semiconductor body, forming a sacrificial layer above a surface of the semiconductor body, applying a diaphragm on the sacrificial layer and removing the sacrificial layer by introducing an etchant into openings of the diaphragm, wherein applying the di...

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Bibliographische Detailangaben

Hauptverfasser:	Faes, Alessandro, Pijnenburg, Remco Henricus Wilhelmus, Siegert, Jörg, Besling, Willem Frederik Adrianus
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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