FLOATING PIN FOR SUBSTRATE TRANSFER

FLOATING PIN FOR SUBSTRATE TRANSFER

A floating pin for positioning a substrate relative to a substrate support includes a shaft configured to move through a guide hole in a substrate support, and a pin head including a top surface and a flat shoulder surface disposed between the top surface and the shaft. The flat shoulder surface is...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: BREZOCZKY, Thomas, PRASAD, Bhaskar, YEDLA, Srinivasa Rao, SOVENAHALLI, Sreenath, SAVANDAIAH, Kirankumar Neelasandra
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A floating pin for positioning a substrate relative to a substrate support includes a shaft configured to move through a guide hole in a substrate support, and a pin head including a top surface and a flat shoulder surface disposed between the top surface and the shaft. The flat shoulder surface is configured to be seated on a recessed surface of the substrate support and seal the guide hole of the substrate support.