A PROCESS TOOL AND AN INSPECTION METHOD
A process tool for processing production substrates, the process tool including: a movable stage configured to perform long-stroke movements in an X-Y plane; an imaging device mounted to a fixed part of the tool and having an optical axis substantially parallel to the X-Y plane; and a mirror mounted...
Gespeichert in:
| Hauptverfasser: | , , , , |
|---|---|
| Format: | Patent |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | |
| container_start_page | |
| container_title | |
| container_volume | |
| creator | STEGEN, Raphael Nico Johan POLET, Theodorus Wilhelmus GATTOBIGIO, Giovanni Luca EUMMELEN, Erik Henricus Egidius Catharina BERENDSEN, Christianus Wilhelmus Johannes |
| description | A process tool for processing production substrates, the process tool including: a movable stage configured to perform long-stroke movements in an X-Y plane; an imaging device mounted to a fixed part of the tool and having an optical axis substantially parallel to the X-Y plane; and a mirror mounted on the movable stage and oriented at a predetermined angle of inclination to the X-Y plane so that by moving the movable stage to a predetermined position a part of a component to be inspected can be imaged by the imaging device. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US2021349397A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US2021349397A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US2021349397A13</originalsourceid><addsrcrecordid>eNrjZFB3VAgI8nd2DQ5WCPH391Fw9HMBYgVPv-AAV-cQT38_BV_XEA9_Fx4G1rTEnOJUXijNzaDs5hri7KGbWpAfn1pckJicmpdaEh8abGRgZGhsYmlsae5oaEycKgBWyySP</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>A PROCESS TOOL AND AN INSPECTION METHOD</title><source>esp@cenet</source><creator>STEGEN, Raphael Nico Johan ; POLET, Theodorus Wilhelmus ; GATTOBIGIO, Giovanni Luca ; EUMMELEN, Erik Henricus Egidius Catharina ; BERENDSEN, Christianus Wilhelmus Johannes</creator><creatorcontrib>STEGEN, Raphael Nico Johan ; POLET, Theodorus Wilhelmus ; GATTOBIGIO, Giovanni Luca ; EUMMELEN, Erik Henricus Egidius Catharina ; BERENDSEN, Christianus Wilhelmus Johannes</creatorcontrib><description>A process tool for processing production substrates, the process tool including: a movable stage configured to perform long-stroke movements in an X-Y plane; an imaging device mounted to a fixed part of the tool and having an optical axis substantially parallel to the X-Y plane; and a mirror mounted on the movable stage and oriented at a predetermined angle of inclination to the X-Y plane so that by moving the movable stage to a predetermined position a part of a component to be inspected can be imaged by the imaging device.</description><language>eng</language><subject>APPARATUS SPECIALLY ADAPTED THEREFOR ; CINEMATOGRAPHY ; ELECTROGRAPHY ; HOLOGRAPHY ; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES ; MATERIALS THEREFOR ; MEASURING ; ORIGINALS THEREFOR ; PHOTOGRAPHY ; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES ; PHYSICS ; TESTING</subject><creationdate>2021</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20211111&DB=EPODOC&CC=US&NR=2021349397A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76294</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20211111&DB=EPODOC&CC=US&NR=2021349397A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>STEGEN, Raphael Nico Johan</creatorcontrib><creatorcontrib>POLET, Theodorus Wilhelmus</creatorcontrib><creatorcontrib>GATTOBIGIO, Giovanni Luca</creatorcontrib><creatorcontrib>EUMMELEN, Erik Henricus Egidius Catharina</creatorcontrib><creatorcontrib>BERENDSEN, Christianus Wilhelmus Johannes</creatorcontrib><title>A PROCESS TOOL AND AN INSPECTION METHOD</title><description>A process tool for processing production substrates, the process tool including: a movable stage configured to perform long-stroke movements in an X-Y plane; an imaging device mounted to a fixed part of the tool and having an optical axis substantially parallel to the X-Y plane; and a mirror mounted on the movable stage and oriented at a predetermined angle of inclination to the X-Y plane so that by moving the movable stage to a predetermined position a part of a component to be inspected can be imaged by the imaging device.</description><subject>APPARATUS SPECIALLY ADAPTED THEREFOR</subject><subject>CINEMATOGRAPHY</subject><subject>ELECTROGRAPHY</subject><subject>HOLOGRAPHY</subject><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</subject><subject>MATERIALS THEREFOR</subject><subject>MEASURING</subject><subject>ORIGINALS THEREFOR</subject><subject>PHOTOGRAPHY</subject><subject>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</subject><subject>PHYSICS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2021</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZFB3VAgI8nd2DQ5WCPH391Fw9HMBYgVPv-AAV-cQT38_BV_XEA9_Fx4G1rTEnOJUXijNzaDs5hri7KGbWpAfn1pckJicmpdaEh8abGRgZGhsYmlsae5oaEycKgBWyySP</recordid><startdate>20211111</startdate><enddate>20211111</enddate><creator>STEGEN, Raphael Nico Johan</creator><creator>POLET, Theodorus Wilhelmus</creator><creator>GATTOBIGIO, Giovanni Luca</creator><creator>EUMMELEN, Erik Henricus Egidius Catharina</creator><creator>BERENDSEN, Christianus Wilhelmus Johannes</creator><scope>EVB</scope></search><sort><creationdate>20211111</creationdate><title>A PROCESS TOOL AND AN INSPECTION METHOD</title><author>STEGEN, Raphael Nico Johan ; POLET, Theodorus Wilhelmus ; GATTOBIGIO, Giovanni Luca ; EUMMELEN, Erik Henricus Egidius Catharina ; BERENDSEN, Christianus Wilhelmus Johannes</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US2021349397A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2021</creationdate><topic>APPARATUS SPECIALLY ADAPTED THEREFOR</topic><topic>CINEMATOGRAPHY</topic><topic>ELECTROGRAPHY</topic><topic>HOLOGRAPHY</topic><topic>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</topic><topic>MATERIALS THEREFOR</topic><topic>MEASURING</topic><topic>ORIGINALS THEREFOR</topic><topic>PHOTOGRAPHY</topic><topic>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</topic><topic>PHYSICS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>STEGEN, Raphael Nico Johan</creatorcontrib><creatorcontrib>POLET, Theodorus Wilhelmus</creatorcontrib><creatorcontrib>GATTOBIGIO, Giovanni Luca</creatorcontrib><creatorcontrib>EUMMELEN, Erik Henricus Egidius Catharina</creatorcontrib><creatorcontrib>BERENDSEN, Christianus Wilhelmus Johannes</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>STEGEN, Raphael Nico Johan</au><au>POLET, Theodorus Wilhelmus</au><au>GATTOBIGIO, Giovanni Luca</au><au>EUMMELEN, Erik Henricus Egidius Catharina</au><au>BERENDSEN, Christianus Wilhelmus Johannes</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>A PROCESS TOOL AND AN INSPECTION METHOD</title><date>2021-11-11</date><risdate>2021</risdate><abstract>A process tool for processing production substrates, the process tool including: a movable stage configured to perform long-stroke movements in an X-Y plane; an imaging device mounted to a fixed part of the tool and having an optical axis substantially parallel to the X-Y plane; and a mirror mounted on the movable stage and oriented at a predetermined angle of inclination to the X-Y plane so that by moving the movable stage to a predetermined position a part of a component to be inspected can be imaged by the imaging device.</abstract><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | |
| ispartof | |
| issn | |
| language | eng |
| recordid | cdi_epo_espacenet_US2021349397A1 |
| source | esp@cenet |
| subjects | APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MATERIALS THEREFOR MEASURING ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS TESTING |
| title | A PROCESS TOOL AND AN INSPECTION METHOD |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-23T01%3A55%3A33IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=STEGEN,%20Raphael%20Nico%20Johan&rft.date=2021-11-11&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS2021349397A1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |