ANTI-REFLECTIVE COATINGS AND METHODS OF FORMING

ANTI-REFLECTIVE COATINGS AND METHODS OF FORMING

An anti-reflective coating including a plurality of first layers, which each comprise a first material with a relatively high refractive index, and a plurality of second layers, which each comprise a second material with a relatively low refractive index. A total thickness of the first layers compri...

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Hauptverfasser: Cangemi, Michael Jerome, Wang, Bin
Format: Patent
Sprache:eng
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OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Wang, Bin
description An anti-reflective coating including a plurality of first layers, which each comprise a first material with a relatively high refractive index, and a plurality of second layers, which each comprise a second material with a relatively low refractive index. A total thickness of the first layers comprised of the first material is about 120 nm or less. Additionally, the anti-reflective coating is configured to absorb about 0.25% or less of light for a single reflection of the average of the s- and p-polarizations of the light, at every wavelength between about 425 nm to about 495 nm, when the light is propagating under total internal reflection.
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subjects OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
title ANTI-REFLECTIVE COATINGS AND METHODS OF FORMING
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