MULTIPLE LAYER ELECTRODE TRANSDUCERS

An electrostatic transducer includes a substrate oriented in a plane, a fixed electrode supported by the substrate, and a moveable electrode supported by the substrate, spaced from the fixed electrode in a first direction parallel to the plane, and configured for movement in a second direction trans...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Jang, Hoyoun, Leahy, Stephane, Diamond, Bruce, Hsu, Wan-Thai, Gupta, Sahil
Format: Patent
Sprache:eng
Schlagworte:
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