Multiple-Output Radiofrequency Matching Module and Associated Methods

A matching module includes an input terminal connected to an input node, a variable load capacitor, and a plurality of RF signal delivery branches. The input terminal is connected to receive RF signals from one or more RF generators. The load capacitor is connected between the input node and a refer...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Leeser, Karl, Lyndaker, Bradford J, Kapoor, Sunil
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS BASIC ELECTRONIC CIRCUITRY ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS RESONATORS
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