Arrayed Column Detector

An electron beam inspection system is disclosed, in accordance with one or more embodiments of the present disclosure. The inspection system may include an electron beam source configured to generate one or more primary electron beams. The inspection system may also include an electron-optical colum...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Muray, Lawrence P, Brodie, Alan D, Fielden, John
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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