SEMICONDUCTOR MEMORY DEVICE

A semiconductor memory device includes a plurality of conductive layers, a semiconductor layer opposed to the plurality of conductive layers, and an electric charge accumulation portion disposed between the semiconductor layer and the plurality of conductive layers. The electric charge accumulation...

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Hauptverfasser: KARIYA, Nayuta, OGURA, Tatsuo, KURUSU, Takashi, TSUDA, Muneyuki, TAKEDA, Hiroshi
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creator KARIYA, Nayuta
OGURA, Tatsuo
KURUSU, Takashi
TSUDA, Muneyuki
TAKEDA, Hiroshi
description A semiconductor memory device includes a plurality of conductive layers, a semiconductor layer opposed to the plurality of conductive layers, and an electric charge accumulation portion disposed between the semiconductor layer and the plurality of conductive layers. The electric charge accumulation portion includes a plurality of first electric charge accumulation portions opposed to the plurality of conductive layers, and a plurality of second electric charge accumulation portions disposed in positions different from the plurality of first electric charge accumulation portions. A distance between the first electric charge accumulation portion and the semiconductor layer is smaller than a distance between the second electric charge accumulation portion and the semiconductor layer. A distance between the second electric charge accumulation portion and the conductive layers is smaller than a distance between the first electric charge accumulation portion and the conductive layers.
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subjects ELECTRICITY
INFORMATION STORAGE
PHYSICS
STATIC STORES
title SEMICONDUCTOR MEMORY DEVICE
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