CARRIER TRAY

A carrier tray includes a housing, an ingot accommodating recess that accommodates a semiconductor ingot, and a wafer accommodating recess that accommodates a wafer. The housing has an upper wall, a lower wall, a pair of side walls connecting the upper wall and the lower wall to each other, and a tu...

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Bibliographische Detailangaben
1. Verfasser: IIZUKA, Kentaro
Format: Patent
Sprache:eng
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