METHOD FOR MANUFACTURING A ONE-PIECE SILICON DEVICE WITH FLEXIBLE BLADES, IN PARTICULAR FOR TIMEPIECES

METHOD FOR MANUFACTURING A ONE-PIECE SILICON DEVICE WITH FLEXIBLE BLADES, IN PARTICULAR FOR TIMEPIECES

A one-piece silicon device with flexible blades (2, 3), in particular for timepieces, for example a pivot with crossed blades, and to a method for manufacturing the device (1). The method includes: forming (21) a one-piece silicon device (1) blank from a wafer of the SOI type, the device (1) includi...

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Hauptverfasser: GANDELHMAN, Alex, CUSIN, Pierre
Format: Patent
Sprache:eng
Schlagworte:
APPARATUS OR TOOLS SPECIALLY DESIGNED FOR MAKING ORMAINTAINING CLOCKS OR WATCHES
HOROLOGY
MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL
MECHANICALLY-DRIVEN CLOCKS OR WATCHES
PHYSICS
TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
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creator GANDELHMAN, Alex
CUSIN, Pierre
description A one-piece silicon device with flexible blades (2, 3), in particular for timepieces, for example a pivot with crossed blades, and to a method for manufacturing the device (1). The method includes: forming (21) a one-piece silicon device (1) blank from a wafer of the SOI type, the device (1) including two flexible blades (2, 3), each formed in a different layer of the SOI wafer, the blades (2, 3) being arranged in two different substantially parallel planes, the blades (2, 3) being separated by a clearance (7); growing a first silicon oxide layer on the surface of at least one of the blades (2, 3) bordering the clearance, the first silicon oxide layer being formed from a first sub-layer of silicon of the one or more blades (2, 3); and removing the first silicon oxide layer to increase the clearance (7) between the two blades (2, 3).
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fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US2021247721A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US2021247721A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US2021247721A13</originalsourceid><addsrcrecordid>eNqNjMsKwjAQAHvxIOo_LHi1YKPQ8zbd2IU0kTzUWymSnkQL9f9Rih_gaRgYZpkNLYXG1qCsgxZNVChDdGxOgGAN5WcmSeBZs7QGarrwV68cGlCablxpgkpjTX4HbOCMLrCMGt08DNzSPPDrbDH0jyltflxlW0VBNnkaX12axv6enundRS_2ohDHshQFFof_qg9KZzWH</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>METHOD FOR MANUFACTURING A ONE-PIECE SILICON DEVICE WITH FLEXIBLE BLADES, IN PARTICULAR FOR TIMEPIECES</title><source>esp@cenet</source><creator>GANDELHMAN, Alex ; CUSIN, Pierre</creator><creatorcontrib>GANDELHMAN, Alex ; CUSIN, Pierre</creatorcontrib><description>A one-piece silicon device with flexible blades (2, 3), in particular for timepieces, for example a pivot with crossed blades, and to a method for manufacturing the device (1). The method includes: forming (21) a one-piece silicon device (1) blank from a wafer of the SOI type, the device (1) including two flexible blades (2, 3), each formed in a different layer of the SOI wafer, the blades (2, 3) being arranged in two different substantially parallel planes, the blades (2, 3) being separated by a clearance (7); growing a first silicon oxide layer on the surface of at least one of the blades (2, 3) bordering the clearance, the first silicon oxide layer being formed from a first sub-layer of silicon of the one or more blades (2, 3); and removing the first silicon oxide layer to increase the clearance (7) between the two blades (2, 3).</description><language>eng</language><subject>APPARATUS OR TOOLS SPECIALLY DESIGNED FOR MAKING ORMAINTAINING CLOCKS OR WATCHES ; HOROLOGY ; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL ; MECHANICALLY-DRIVEN CLOCKS OR WATCHES ; PHYSICS ; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS</subject><creationdate>2021</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20210812&amp;DB=EPODOC&amp;CC=US&amp;NR=2021247721A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20210812&amp;DB=EPODOC&amp;CC=US&amp;NR=2021247721A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>GANDELHMAN, Alex</creatorcontrib><creatorcontrib>CUSIN, Pierre</creatorcontrib><title>METHOD FOR MANUFACTURING A ONE-PIECE SILICON DEVICE WITH FLEXIBLE BLADES, IN PARTICULAR FOR TIMEPIECES</title><description>A one-piece silicon device with flexible blades (2, 3), in particular for timepieces, for example a pivot with crossed blades, and to a method for manufacturing the device (1). The method includes: forming (21) a one-piece silicon device (1) blank from a wafer of the SOI type, the device (1) including two flexible blades (2, 3), each formed in a different layer of the SOI wafer, the blades (2, 3) being arranged in two different substantially parallel planes, the blades (2, 3) being separated by a clearance (7); growing a first silicon oxide layer on the surface of at least one of the blades (2, 3) bordering the clearance, the first silicon oxide layer being formed from a first sub-layer of silicon of the one or more blades (2, 3); and removing the first silicon oxide layer to increase the clearance (7) between the two blades (2, 3).</description><subject>APPARATUS OR TOOLS SPECIALLY DESIGNED FOR MAKING ORMAINTAINING CLOCKS OR WATCHES</subject><subject>HOROLOGY</subject><subject>MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL</subject><subject>MECHANICALLY-DRIVEN CLOCKS OR WATCHES</subject><subject>PHYSICS</subject><subject>TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2021</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNjMsKwjAQAHvxIOo_LHi1YKPQ8zbd2IU0kTzUWymSnkQL9f9Rih_gaRgYZpkNLYXG1qCsgxZNVChDdGxOgGAN5WcmSeBZs7QGarrwV68cGlCablxpgkpjTX4HbOCMLrCMGt08DNzSPPDrbDH0jyltflxlW0VBNnkaX12axv6enundRS_2ohDHshQFFof_qg9KZzWH</recordid><startdate>20210812</startdate><enddate>20210812</enddate><creator>GANDELHMAN, Alex</creator><creator>CUSIN, Pierre</creator><scope>EVB</scope></search><sort><creationdate>20210812</creationdate><title>METHOD FOR MANUFACTURING A ONE-PIECE SILICON DEVICE WITH FLEXIBLE BLADES, IN PARTICULAR FOR TIMEPIECES</title><author>GANDELHMAN, Alex ; CUSIN, Pierre</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US2021247721A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2021</creationdate><topic>APPARATUS OR TOOLS SPECIALLY DESIGNED FOR MAKING ORMAINTAINING CLOCKS OR WATCHES</topic><topic>HOROLOGY</topic><topic>MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL</topic><topic>MECHANICALLY-DRIVEN CLOCKS OR WATCHES</topic><topic>PHYSICS</topic><topic>TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS</topic><toplevel>online_resources</toplevel><creatorcontrib>GANDELHMAN, Alex</creatorcontrib><creatorcontrib>CUSIN, Pierre</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>GANDELHMAN, Alex</au><au>CUSIN, Pierre</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>METHOD FOR MANUFACTURING A ONE-PIECE SILICON DEVICE WITH FLEXIBLE BLADES, IN PARTICULAR FOR TIMEPIECES</title><date>2021-08-12</date><risdate>2021</risdate><abstract>A one-piece silicon device with flexible blades (2, 3), in particular for timepieces, for example a pivot with crossed blades, and to a method for manufacturing the device (1). The method includes: forming (21) a one-piece silicon device (1) blank from a wafer of the SOI type, the device (1) including two flexible blades (2, 3), each formed in a different layer of the SOI wafer, the blades (2, 3) being arranged in two different substantially parallel planes, the blades (2, 3) being separated by a clearance (7); growing a first silicon oxide layer on the surface of at least one of the blades (2, 3) bordering the clearance, the first silicon oxide layer being formed from a first sub-layer of silicon of the one or more blades (2, 3); and removing the first silicon oxide layer to increase the clearance (7) between the two blades (2, 3).</abstract><oa>free_for_read</oa></addata></record>
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subjects APPARATUS OR TOOLS SPECIALLY DESIGNED FOR MAKING ORMAINTAINING CLOCKS OR WATCHES
HOROLOGY
MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL
MECHANICALLY-DRIVEN CLOCKS OR WATCHES
PHYSICS
TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
title METHOD FOR MANUFACTURING A ONE-PIECE SILICON DEVICE WITH FLEXIBLE BLADES, IN PARTICULAR FOR TIMEPIECES
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-29T23%3A48%3A36IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=GANDELHMAN,%20Alex&rft.date=2021-08-12&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS2021247721A1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true