DIELECTRIC THIN FILM, CAPACITOR ELEMENT, AND ELECTRONIC CIRCUIT BOARD

A capacitive element and a dielectric thin film having a small dielectric loss and a large relative permittivity, particularly at low frequencies. [Solution] This dielectric thin film includes an A-B-O-N oxynitride. When the A-B-O-N oxynitride is represented by the compositional formula AaBbOoNn, (o...

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Hauptverfasser: SATO, Wakiko, YAMAZAKI, Junichi, YAMAZAKI, Kumiko
Format: Patent
Sprache:eng
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Zusammenfassung:A capacitive element and a dielectric thin film having a small dielectric loss and a large relative permittivity, particularly at low frequencies. [Solution] This dielectric thin film includes an A-B-O-N oxynitride. When the A-B-O-N oxynitride is represented by the compositional formula AaBbOoNn, (o+n)/a