WIRING STRUCTURES AND VERTICAL MEMORY DEVICES INCLUDING THE SAME

A wiring structure includes first to third metal patterns on a substrate. The first metal pattern extends in a second direction and has a first width in a third direction. The second metal pattern extends in the third direction to cross the first metal pattern and have a second width in the second d...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Park, Honyun, Lee, Jeonggil, Lee, Chanyang, Kim, Sukhoon, Park, Sungmyong
Format: Patent
Sprache:eng
Schlagworte:
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