Systems and Methods for Flow Sensor Back Pressure Adjustment for Mass Flow Controller

Systems and Methods for Flow Sensor Back Pressure Adjustment for Mass Flow Controller

A mass flow control apparatus comprising a proportional valve upstream of a flow measurement portion, a pressure sensing element fluidly connected to determine a fluid pressure downstream of the flow measurement portion, and a dynamically adjustable variable valve downstream of the flow measurement...

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Hauptverfasser: REDEMANN, Eric J, SOMANI, Bhushan, ELLEC, Christophe
Format: Patent
Sprache:eng
Schlagworte:
CONTROLLING
MEASURING
MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL
METERING BY VOLUME
PHYSICS
REGULATING
SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
TESTING
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creator REDEMANN, Eric J
SOMANI, Bhushan
ELLEC, Christophe
description A mass flow control apparatus comprising a proportional valve upstream of a flow measurement portion, a pressure sensing element fluidly connected to determine a fluid pressure downstream of the flow measurement portion, and a dynamically adjustable variable valve downstream of the flow measurement portion and adjacent to the pressure sensing element connection. Fluid conductance of the variable valve is adjusted according to a control scheme based upon limitations of the flow measurement portion. Integral flow verification may be enabled with additional fluid pathway elements upstream of the flow measurement portion.
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subjects CONTROLLING
MEASURING
MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL
METERING BY VOLUME
PHYSICS
REGULATING
SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
TESTING
title Systems and Methods for Flow Sensor Back Pressure Adjustment for Mass Flow Controller
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