Actuator and Manufacture Method Thereof, Operation Method Thereof, and Movable Device

An actuator and a manufacture method thereof, an operation method thereof, and a movable device. The actuator includes a photodeformation layer and a first driving unit, the first driving unit includes at least one first light emitting device, the first light emitting device is connected to a first...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Zou, Qinghua, Zhu, Ruhui, Zeng, Suwei, Yao, Gu, Wang, Yu
Format:	Patent
Sprache:	eng
Schlagworte:	MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TRANSPORTING
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