INSPECTION SYSTEM OF SEMICONDUCTOR DEVICE AND RELATED INSPECTION METHOD

INSPECTION SYSTEM OF SEMICONDUCTOR DEVICE AND RELATED INSPECTION METHOD

An inspection system of semiconductor device includes a light source for producing a light beam, a lens module including at least one metalens, a receiver, and a processor. During an inspection process, the light beam emitted from the light source is focused on a target object by the metalens of the...

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Hauptverfasser: Chen, Guangdian, CHEN, JIN XING
Format: Patent
Sprache:eng
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INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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CHEN, JIN XING
description An inspection system of semiconductor device includes a light source for producing a light beam, a lens module including at least one metalens, a receiver, and a processor. During an inspection process, the light beam emitted from the light source is focused on a target object by the metalens of the lens module and is reflected to form a reflected light by the target object. The receiver is used for receiving the reflected light. The processor is used for receiving an electric signal corresponding to the reflected light and generating an inspection result.
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subjects INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
title INSPECTION SYSTEM OF SEMICONDUCTOR DEVICE AND RELATED INSPECTION METHOD
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