METHODS OF MANUFACTURING SEMICONDUCTOR DEVICES AND APPARATUSES FOR MANUFACTURING THE SAME

A method of manufacturing a semiconductor device may include forming a stack structure by alternately stacking sacrificial layers and interlayer insulating layers on a substrate, forming channel structures extending through the stack structure, forming openings extending through the stack structure,...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HAN, Hauk, LEE, Changwoo, RYU, Wangyup, LEE, Keun, PARK, Kyungwook, LIM, Taisoo
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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