METHOD AND SYSTEM FOR EVALUATING OBJECTS

A method and a system. The system may include (a) evaluation units, (b) an object distribution system for receiving the objects and distributing the objects between the evaluation units, and (c) at least one controller. Each evaluation unit may include (i) a chamber housing that has an inner space,...

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Hauptverfasser:	Sender, Benzion, Krivts (Krayvitz), Igor, Uziel, Yoram, Vinnitsky, Efim, Naftali, Ron
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING GAMMA RAY OR X-RAY MICROSCOPES IRRADIATION DEVICES NUCLEAR ENGINEERING NUCLEAR PHYSICS PHYSICS TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR
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creator	Sender, Benzion Krivts (Krayvitz), Igor Uziel, Yoram Vinnitsky, Efim Naftali, Ron
description	A method and a system. The system may include (a) evaluation units, (b) an object distribution system for receiving the objects and distributing the objects between the evaluation units, and (c) at least one controller. Each evaluation unit may include (i) a chamber housing that has an inner space, (ii) a chuck, (iii) a movement system that is configured to move the chuck, and (iv) a charged particle module that is configured to irradiate the object with a charged particle beam, and to detect particles emitted from the object. In each evaluation unit a length of the inner space is smaller than twice a length of the object, and a width of the inner space is smaller than twice a width of the object.
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subjects	CALCULATING COMPUTING COUNTING GAMMA RAY OR X-RAY MICROSCOPES IRRADIATION DEVICES NUCLEAR ENGINEERING NUCLEAR PHYSICS PHYSICS TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR
title	METHOD AND SYSTEM FOR EVALUATING OBJECTS
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