DEFECT PREDICTION

A method including obtaining verified values of a characteristic of a plurality of patterns on a substrate produced by a device manufacturing process; obtaining computed values of the characteristic using a non-probabilistic model; obtaining values of a residue of the non-probabilistic model based o...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHEONG, Lin Lee, LA FONTAINE, Bruno, YUDHISTIRA, Yasri, KEA, Marc Jurian, GENIN, Maxime Philippe Frederic
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING PHYSICS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!