RESONATOR ELECTRODE CONFIGURATION TO AVOID CAPACITIVE FEEDTHROUGH FOR VIBRATING BEAM ACCELEROMETERS

This disclosure describes techniques of configuring capacitive comb fingers of an accelerometer resonator into discreet electrodes with drive electrodes and at least two sense electrodes. The routing of electrical signals is configured to produce parasitic feedthrough capacitances that are approxima...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	Reinke, John
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS TESTING TRANSPORTING
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