TEMPERATURE CONTROL SYSTEM AND INTEGRATED TEMPERATURE CONTROL SYSTEM

A temperature control system is used for controlling a temperature of a control target. The system includes: a first circulation circuit through which a first heat transfer medium circulates; a second circulation circuit that is independent of the first circulation circuit and through which a second...

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Bibliographische Detailangaben
Hauptverfasser: Fukusumi, Yukihiro, Hasegawa, Isahiro, Ito, Akihiro, Nakazawa, Toshiharu, Takanashi, Keisuke, Kokubo, Norio, Kouketsu, Masayuki
Format: Patent
Sprache:eng
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Zusammenfassung:A temperature control system is used for controlling a temperature of a control target. The system includes: a first circulation circuit through which a first heat transfer medium circulates; a second circulation circuit that is independent of the first circulation circuit and through which a second heat transfer medium circulates; and a third circulation circuit that is independent of the first circulation circuit and the second circulation circuit and through which a third heat transfer medium circulates. The third heat transfer medium has a usable temperature range wider than usable temperature ranges of the first heat transfer medium and the second heat transfer medium.