SINGLE-CHIP CONTAINING POROUS-WAFER BATTERY AND DEVICE AND METHOD OF MAKING THE SAME

A chip comprises a porous wafer battery and a device. The chip further comprises a wafer containing the device and at least a portion of the porous wafer battery. The wafer comprises a silicon substrate. The silicon substrate comprises a first region and a second region. The first region comprises a plurality of pores of the porous wafer battery. The second region 345 comprises a trench to accommodate a gate electrode of the device. A method of fabrication a chip comprising the steps of providing a substrate comprising a plurality of doped regions; patterning a mask on a front surface of the substrate; applying an etching process forming the plurality of pores in the first region of the substrate and the trench in the second region of the substrate; and then removing the mask.