METHOD OF UNLOADING AN OBJECT FROM A SUPPORT TABLE

METHOD OF UNLOADING AN OBJECT FROM A SUPPORT TABLE

A method of unloading an object from a support table, the object clamped to the support table during an exposure process by: applying a first pressure to a central region of the support table under a central portion of the object; and applying a second pressure to a peripheral region of the support...

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Hauptverfasser: BLOKS, Ruud Hendrikus Martinus Johannes, VAN DEN HEUVEL, Marco Adrianus Peter, DE SIMONE, Giovanna, ROSET, Niek Jacobus Johannes, GERRITZEN, Justin Johannes Hermanns, LAURENT, Thibault Simon Mathieu
Format: Patent
Sprache:eng
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APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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creator BLOKS, Ruud Hendrikus Martinus Johannes
VAN DEN HEUVEL, Marco Adrianus Peter
DE SIMONE, Giovanna
ROSET, Niek Jacobus Johannes
GERRITZEN, Justin Johannes Hermanns
LAURENT, Thibault Simon Mathieu
description A method of unloading an object from a support table, the object clamped to the support table during an exposure process by: applying a first pressure to a central region of the support table under a central portion of the object; and applying a second pressure to a peripheral region of the support table under a peripheral portion of the object, wherein during clamping the first pressure and the second pressure are controlled such that liquid is retained between the object and a seal member that is positioned radially between the central region and the peripheral region at an upper surface of the support table and protrudes towards the object, the method including: increasing the first pressure towards ambient pressure; removing at least some of the liquid retained between the object and the seal member by decreasing the second pressure; and increasing the second pressure towards the ambient pressure.
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subjects APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
title METHOD OF UNLOADING AN OBJECT FROM A SUPPORT TABLE
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