SYSTEMS AND METHODS OF OPERATION OF CAPACITIVE RADIO FREQUENCY MICRO-ELECTROMECHANICAL SWITCHES
Disclosed are systems and methods of operation for capacitive radio frequency micro-electromechanical switches, such as CMUT cells for use in an ultrasound system. An RFMEMS may include substrate, a first electrode connected to the substrate, a membrane and a second electrode connected to the membra...
Gespeichert in:
| Hauptverfasser: | , , , , , |
|---|---|
| Format: | Patent |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | |
| container_start_page | |
| container_title | |
| container_volume | |
| creator | Dirksen, Peter Shulepov, Sergei Timmermans, Petrus Henricus Maria Loebl, Hans-Peter Budzelaar, Franciscus Paulus Maria de Wild, Nico Maris Adriaan |
| description | Disclosed are systems and methods of operation for capacitive radio frequency micro-electromechanical switches, such as CMUT cells for use in an ultrasound system. An RFMEMS may include substrate, a first electrode connected to the substrate, a membrane and a second electrode connected to the membrane. In some examples, there is a dielectric stack between the first and second electrodes. The dielectric stack design minimizes drift in the membrane collapse voltage. In other examples, a voltage supply coupled to an ultrasonic array compressing the CMUT cells is adapted to provide a sequence of voltage profiles to the electrodes of the CMUT cell, wherein each profile includes a bias voltage and a stimulus voltage, and wherein a polarity of each subsequent voltage profile in the sequence is opposite to the polarity of the preceding profile. In another example, there is a capacitance sensing circuit provided, which is arranged to determine a drift voltage of the CMUT cell. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US2021129187A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US2021129187A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US2021129187A13</originalsourceid><addsrcrecordid>eNqNijEKwkAQANNYiPqHBeuAFwu1XDYbcpC71duLkioEOSvRQPw_KvgAq2GYmWe9dhrZKaAvwXGspVSQCuTIAaMV_xXCI5KN9swQsLQCVeBTy546cJaC5NwwxSCOqUZvCRvQi41Usy6z2W24T2n14yJbV_wpeRqffZrG4Zoe6dW3WmwKY4qD2e_QbP-73jS-NFQ</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>SYSTEMS AND METHODS OF OPERATION OF CAPACITIVE RADIO FREQUENCY MICRO-ELECTROMECHANICAL SWITCHES</title><source>esp@cenet</source><creator>Dirksen, Peter ; Shulepov, Sergei ; Timmermans, Petrus Henricus Maria ; Loebl, Hans-Peter ; Budzelaar, Franciscus Paulus Maria ; de Wild, Nico Maris Adriaan</creator><creatorcontrib>Dirksen, Peter ; Shulepov, Sergei ; Timmermans, Petrus Henricus Maria ; Loebl, Hans-Peter ; Budzelaar, Franciscus Paulus Maria ; de Wild, Nico Maris Adriaan</creatorcontrib><description>Disclosed are systems and methods of operation for capacitive radio frequency micro-electromechanical switches, such as CMUT cells for use in an ultrasound system. An RFMEMS may include substrate, a first electrode connected to the substrate, a membrane and a second electrode connected to the membrane. In some examples, there is a dielectric stack between the first and second electrodes. The dielectric stack design minimizes drift in the membrane collapse voltage. In other examples, a voltage supply coupled to an ultrasonic array compressing the CMUT cells is adapted to provide a sequence of voltage profiles to the electrodes of the CMUT cell, wherein each profile includes a bias voltage and a stimulus voltage, and wherein a polarity of each subsequent voltage profile in the sequence is opposite to the polarity of the preceding profile. In another example, there is a capacitance sensing circuit provided, which is arranged to determine a drift voltage of the CMUT cell.</description><language>eng</language><subject>AXLES FOR WHEELS OR CASTORS ; CASTORS ; FOR PERFORMING MECHANICAL WORK IN GENERAL ; GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL ; INCREASING WHEEL ADHESION ; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES ; MEASURING ; METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY ; PERFORMING OPERATIONS ; PHYSICS ; TESTING ; TRANSPORTING ; VEHICLE WHEELS ; VEHICLES IN GENERAL</subject><creationdate>2021</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20210506&DB=EPODOC&CC=US&NR=2021129187A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20210506&DB=EPODOC&CC=US&NR=2021129187A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Dirksen, Peter</creatorcontrib><creatorcontrib>Shulepov, Sergei</creatorcontrib><creatorcontrib>Timmermans, Petrus Henricus Maria</creatorcontrib><creatorcontrib>Loebl, Hans-Peter</creatorcontrib><creatorcontrib>Budzelaar, Franciscus Paulus Maria</creatorcontrib><creatorcontrib>de Wild, Nico Maris Adriaan</creatorcontrib><title>SYSTEMS AND METHODS OF OPERATION OF CAPACITIVE RADIO FREQUENCY MICRO-ELECTROMECHANICAL SWITCHES</title><description>Disclosed are systems and methods of operation for capacitive radio frequency micro-electromechanical switches, such as CMUT cells for use in an ultrasound system. An RFMEMS may include substrate, a first electrode connected to the substrate, a membrane and a second electrode connected to the membrane. In some examples, there is a dielectric stack between the first and second electrodes. The dielectric stack design minimizes drift in the membrane collapse voltage. In other examples, a voltage supply coupled to an ultrasonic array compressing the CMUT cells is adapted to provide a sequence of voltage profiles to the electrodes of the CMUT cell, wherein each profile includes a bias voltage and a stimulus voltage, and wherein a polarity of each subsequent voltage profile in the sequence is opposite to the polarity of the preceding profile. In another example, there is a capacitance sensing circuit provided, which is arranged to determine a drift voltage of the CMUT cell.</description><subject>AXLES FOR WHEELS OR CASTORS</subject><subject>CASTORS</subject><subject>FOR PERFORMING MECHANICAL WORK IN GENERAL</subject><subject>GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL</subject><subject>INCREASING WHEEL ADHESION</subject><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</subject><subject>MEASURING</subject><subject>METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY</subject><subject>PERFORMING OPERATIONS</subject><subject>PHYSICS</subject><subject>TESTING</subject><subject>TRANSPORTING</subject><subject>VEHICLE WHEELS</subject><subject>VEHICLES IN GENERAL</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2021</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNijEKwkAQANNYiPqHBeuAFwu1XDYbcpC71duLkioEOSvRQPw_KvgAq2GYmWe9dhrZKaAvwXGspVSQCuTIAaMV_xXCI5KN9swQsLQCVeBTy546cJaC5NwwxSCOqUZvCRvQi41Usy6z2W24T2n14yJbV_wpeRqffZrG4Zoe6dW3WmwKY4qD2e_QbP-73jS-NFQ</recordid><startdate>20210506</startdate><enddate>20210506</enddate><creator>Dirksen, Peter</creator><creator>Shulepov, Sergei</creator><creator>Timmermans, Petrus Henricus Maria</creator><creator>Loebl, Hans-Peter</creator><creator>Budzelaar, Franciscus Paulus Maria</creator><creator>de Wild, Nico Maris Adriaan</creator><scope>EVB</scope></search><sort><creationdate>20210506</creationdate><title>SYSTEMS AND METHODS OF OPERATION OF CAPACITIVE RADIO FREQUENCY MICRO-ELECTROMECHANICAL SWITCHES</title><author>Dirksen, Peter ; Shulepov, Sergei ; Timmermans, Petrus Henricus Maria ; Loebl, Hans-Peter ; Budzelaar, Franciscus Paulus Maria ; de Wild, Nico Maris Adriaan</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US2021129187A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2021</creationdate><topic>AXLES FOR WHEELS OR CASTORS</topic><topic>CASTORS</topic><topic>FOR PERFORMING MECHANICAL WORK IN GENERAL</topic><topic>GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL</topic><topic>INCREASING WHEEL ADHESION</topic><topic>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</topic><topic>MEASURING</topic><topic>METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY</topic><topic>PERFORMING OPERATIONS</topic><topic>PHYSICS</topic><topic>TESTING</topic><topic>TRANSPORTING</topic><topic>VEHICLE WHEELS</topic><topic>VEHICLES IN GENERAL</topic><toplevel>online_resources</toplevel><creatorcontrib>Dirksen, Peter</creatorcontrib><creatorcontrib>Shulepov, Sergei</creatorcontrib><creatorcontrib>Timmermans, Petrus Henricus Maria</creatorcontrib><creatorcontrib>Loebl, Hans-Peter</creatorcontrib><creatorcontrib>Budzelaar, Franciscus Paulus Maria</creatorcontrib><creatorcontrib>de Wild, Nico Maris Adriaan</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Dirksen, Peter</au><au>Shulepov, Sergei</au><au>Timmermans, Petrus Henricus Maria</au><au>Loebl, Hans-Peter</au><au>Budzelaar, Franciscus Paulus Maria</au><au>de Wild, Nico Maris Adriaan</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>SYSTEMS AND METHODS OF OPERATION OF CAPACITIVE RADIO FREQUENCY MICRO-ELECTROMECHANICAL SWITCHES</title><date>2021-05-06</date><risdate>2021</risdate><abstract>Disclosed are systems and methods of operation for capacitive radio frequency micro-electromechanical switches, such as CMUT cells for use in an ultrasound system. An RFMEMS may include substrate, a first electrode connected to the substrate, a membrane and a second electrode connected to the membrane. In some examples, there is a dielectric stack between the first and second electrodes. The dielectric stack design minimizes drift in the membrane collapse voltage. In other examples, a voltage supply coupled to an ultrasonic array compressing the CMUT cells is adapted to provide a sequence of voltage profiles to the electrodes of the CMUT cell, wherein each profile includes a bias voltage and a stimulus voltage, and wherein a polarity of each subsequent voltage profile in the sequence is opposite to the polarity of the preceding profile. In another example, there is a capacitance sensing circuit provided, which is arranged to determine a drift voltage of the CMUT cell.</abstract><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | |
| ispartof | |
| issn | |
| language | eng |
| recordid | cdi_epo_espacenet_US2021129187A1 |
| source | esp@cenet |
| subjects | AXLES FOR WHEELS OR CASTORS CASTORS FOR PERFORMING MECHANICAL WORK IN GENERAL GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL INCREASING WHEEL ADHESION INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY PERFORMING OPERATIONS PHYSICS TESTING TRANSPORTING VEHICLE WHEELS VEHICLES IN GENERAL |
| title | SYSTEMS AND METHODS OF OPERATION OF CAPACITIVE RADIO FREQUENCY MICRO-ELECTROMECHANICAL SWITCHES |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-18T17%3A24%3A46IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=Dirksen,%20Peter&rft.date=2021-05-06&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS2021129187A1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |