SUSCEPTOR FOR SEMICONDUCTOR SUBSTRATE PROCESSING

A susceptor for semiconductor substrate processing is disclosed herein. In some embodiments, the susceptor may comprise an inner susceptor portion and an outer susceptor portion. The susceptor portions may self-align via complementary features, such as tabs on the outer susceptor and recesses on the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Lin, Xing, Demos, Alexandros, Luan, Siyao, Rathi, Saket, Rajavelu Muralidhar, Shiva K.T
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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