BACK END OF THE LINE METAL STRUCTURE AND METHOD

Disclosed are embodiments of a back end of the line (BEOL) metal structure that includes, within a metal level, a metal via, which has at least eight sides and all interior angles at 135° or more, and a metal wire thereon. The metal wire and via include respective portions of a continuous conformal...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Byloos, Carla, Witnik, Oliver M, Breuer, Dirk, Schuehrer, Holger S
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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