Composite Piezoelectric Film and Bulk Acoustic Resonator Incorporating Same

A bulk acoustic wave resonator with better performance and better manufacturability is described. The bulk acoustic wave resonator includes a composite piezoelectric film. The composite piezoelectric film includes a first sublayer of a first piezoelectric material, a second sublayer of a second piez...

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Bibliographische Detailangaben

Hauptverfasser:	Hou, Liping D, Wang, Shing-Kuo
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRONIC CIRCUITRY ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS RESONATORS
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