PRECISION SPACING CONTROL FOR OPTICAL WAVEGUIDES

Aspects described herein include a method of fabricating an optical apparatus. The method comprises etching a plurality of trenches partly through a first optical waveguide formed in a first semiconductor layer, wherein a first ridge is formed in the first optical waveguide between adjacent trenches...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	ZHANG, Xunyuan
Format:	Patent
Sprache:	eng
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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