ACTIVE ENERGY RADIATION UNIT AND ACTIVE ENERGY RADIATION DEVICE

An active energy radiation unit includes a light source which radiates ultraviolet rays onto a target object, and a main gas supply mechanism which is disposed to be adjacent to the light source and ejects an inert gas. The main gas supply mechanism includes a receiving part which receives the inert...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: UMENO, Keita, MATUI, Ryotaro, MURAYAMA, Kyoichi
Format: Patent
Sprache:eng
Schlagworte:
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