DEVICE AND METHOD FOR MEASURING THICKNESS

A thickness measuring device includes a laser emitting a laser beam to an object in a semiconductor processing chamber, a quartz glass inside the chamber reflecting part of the laser beam and to transmit a remainder of the laser beam, a first light receiving sensor detecting an intensity of first re...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JUNG, Sung Mook, JEGAL, Mun Hyeong, HWANG, Jong Jin, MOON, Seung Jae, YUN, Jung Ho, RYU, Cheong Il
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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