CHARGED PARTICLE BEAM APPARATUS

In order to provide a charged particle beam apparatus capable of stably detecting secondary particles and electromagnetic waves even for a non-conductive sample under high vacuum environment and enabling excellent observation and analysis, the charged particle beam apparatus includes a charged parti...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SAITO, Tsutomu, NAKAMURA, Yohei, TSUNO, Natsuki, NAKAMURA, Mitsuhiro, ITABASHI, Hironori, SATOU, Hirofumi, SASAJIMA, Masahiro
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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