APPARATUS INCLUDING BARRIER MATERIALS WITHIN ACCESS LINE STRUCTURES, AND RELATED METHODS AND ELECTRONIC SYSTEMS

An apparatus comprising a memory array comprising access lines. Each of the access lines comprises an insulating material adjacent a bottom surface and sidewalls of a base material, a first conductive material adjacent the insulating material, a second conductive material adjacent the first conducti...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Kim, Dojun, Kelkar, Sanket S, Nobuto, Hidekazu, Petz, Christopher W
Format: Patent
Sprache:eng
Schlagworte:
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