WAFER TRANSPORT ASSEMBLY WITH INTEGRATED BUFFERS

A substrate processing tool includes a wafer transport assembly that includes a first wafer transport module and extends along a longitudinal axis of the substrate processing tool. A plurality of process modules includes a first process module and a second process module arranged on opposite sides o...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Daugherty, John E, Kellogg, Michael, Pena, Christopher, Gould, Richard H, Kunkel, Klay, Trussell, David
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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