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Semiconductor structures and methods of forming such structures are disclosed. In an embodiment, the semiconductor structure comprises a substrate, a dielectric layer, and a plurality of gates, including a first gate and a pair of adjacent gates. The method comprises forming gate caps on the adjacen...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Pranatharthiharan, Balasubramanian, Seo, Soon-Cheon, Ok, Injo, Surisetty, Charan V
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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