METHOD AND APPARATUS FOR CONTROLLING A FOCUS POINT OF A STATIONARY BEAM FOCUSING ON A SAMPLE IN A ROTATING CARTRIDGE PLACED IN A ROTATING DISC

Provided are methods and apparatuses for controlling a position of a target point on a processing result relative to a focus point of a focusing sensor system for determining properties of the processing result. The method includes the steps of determining an initial focus point of the focusing sens...

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Bibliographische Detailangaben
Hauptverfasser: STENMARK, Sebastian, BORCH, Stig Morten, TRONRUD, Ole Christian, JAHREN, Rolf
Format: Patent
Sprache:eng
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