SENSORS FOR DETECTING SUBSTITUTION BETWEEN CHEMICALS AND METHODS OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SENSOR
Sensors for detecting a substitution between chemicals may include an upper electrode and an electrical signal measurement circuit. A first chemical and a second chemical may be sequentially applied to the upper electrode. A triboelectrification may be generated between the upper electrode and the f...
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| creator | Kim, Heehwan Jung, Daesung Soh, Sangyoon Song, Jongmin Lee, Jiyoung |
| description | Sensors for detecting a substitution between chemicals may include an upper electrode and an electrical signal measurement circuit. A first chemical and a second chemical may be sequentially applied to the upper electrode. A triboelectrification may be generated between the upper electrode and the first and second chemicals to flow different electrical signals through the upper electrode. The electrical signal measurement circuit may measure the electrical signals to detect the substitution between the first and second chemicals. Thus, the second chemical may be applied to a semiconductor substrate from the substitution timing so that an original function of the second chemical may be maintained without a delay of the time for fabricating a semiconductor device. |
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| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US2020386705A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US2020386705A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US2020386705A13</originalsourceid><addsrcrecordid>eNqNjb0KwkAQhNNYiPoOC9ZCTPCnvdzteQdmD7J7WoYgZyUaiI1vL1EfwGqK-b6ZafZiJA4Ngw0NGBTU4ukAHCsWL1F8IKhQzogE2mHttToyKDJQo7hgGIKFWlG0SktsRlcBj1wgE7V8Vk9eI0QeS3EI38t5Nrl2tyEtfjnLlhZFu1XqH20a-u6S7unZRi7yIi_3212-UevyP-oN_xI7kg</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>SENSORS FOR DETECTING SUBSTITUTION BETWEEN CHEMICALS AND METHODS OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SENSOR</title><source>esp@cenet</source><creator>Kim, Heehwan ; Jung, Daesung ; Soh, Sangyoon ; Song, Jongmin ; Lee, Jiyoung</creator><creatorcontrib>Kim, Heehwan ; Jung, Daesung ; Soh, Sangyoon ; Song, Jongmin ; Lee, Jiyoung</creatorcontrib><description>Sensors for detecting a substitution between chemicals may include an upper electrode and an electrical signal measurement circuit. A first chemical and a second chemical may be sequentially applied to the upper electrode. A triboelectrification may be generated between the upper electrode and the first and second chemicals to flow different electrical signals through the upper electrode. The electrical signal measurement circuit may measure the electrical signals to detect the substitution between the first and second chemicals. Thus, the second chemical may be applied to a semiconductor substrate from the substitution timing so that an original function of the second chemical may be maintained without a delay of the time for fabricating a semiconductor device.</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES ; MEASURING ; PHYSICS ; SEMICONDUCTOR DEVICES ; TESTING</subject><creationdate>2020</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20201210&DB=EPODOC&CC=US&NR=2020386705A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25563,76318</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20201210&DB=EPODOC&CC=US&NR=2020386705A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Kim, Heehwan</creatorcontrib><creatorcontrib>Jung, Daesung</creatorcontrib><creatorcontrib>Soh, Sangyoon</creatorcontrib><creatorcontrib>Song, Jongmin</creatorcontrib><creatorcontrib>Lee, Jiyoung</creatorcontrib><title>SENSORS FOR DETECTING SUBSTITUTION BETWEEN CHEMICALS AND METHODS OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SENSOR</title><description>Sensors for detecting a substitution between chemicals may include an upper electrode and an electrical signal measurement circuit. A first chemical and a second chemical may be sequentially applied to the upper electrode. A triboelectrification may be generated between the upper electrode and the first and second chemicals to flow different electrical signals through the upper electrode. The electrical signal measurement circuit may measure the electrical signals to detect the substitution between the first and second chemicals. Thus, the second chemical may be applied to a semiconductor substrate from the substitution timing so that an original function of the second chemical may be maintained without a delay of the time for fabricating a semiconductor device.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</subject><subject>MEASURING</subject><subject>PHYSICS</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2020</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNjb0KwkAQhNNYiPoOC9ZCTPCnvdzteQdmD7J7WoYgZyUaiI1vL1EfwGqK-b6ZafZiJA4Ngw0NGBTU4ukAHCsWL1F8IKhQzogE2mHttToyKDJQo7hgGIKFWlG0SktsRlcBj1wgE7V8Vk9eI0QeS3EI38t5Nrl2tyEtfjnLlhZFu1XqH20a-u6S7unZRi7yIi_3212-UevyP-oN_xI7kg</recordid><startdate>20201210</startdate><enddate>20201210</enddate><creator>Kim, Heehwan</creator><creator>Jung, Daesung</creator><creator>Soh, Sangyoon</creator><creator>Song, Jongmin</creator><creator>Lee, Jiyoung</creator><scope>EVB</scope></search><sort><creationdate>20201210</creationdate><title>SENSORS FOR DETECTING SUBSTITUTION BETWEEN CHEMICALS AND METHODS OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SENSOR</title><author>Kim, Heehwan ; Jung, Daesung ; Soh, Sangyoon ; Song, Jongmin ; Lee, Jiyoung</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US2020386705A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2020</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</topic><topic>MEASURING</topic><topic>PHYSICS</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>Kim, Heehwan</creatorcontrib><creatorcontrib>Jung, Daesung</creatorcontrib><creatorcontrib>Soh, Sangyoon</creatorcontrib><creatorcontrib>Song, Jongmin</creatorcontrib><creatorcontrib>Lee, Jiyoung</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Kim, Heehwan</au><au>Jung, Daesung</au><au>Soh, Sangyoon</au><au>Song, Jongmin</au><au>Lee, Jiyoung</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>SENSORS FOR DETECTING SUBSTITUTION BETWEEN CHEMICALS AND METHODS OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SENSOR</title><date>2020-12-10</date><risdate>2020</risdate><abstract>Sensors for detecting a substitution between chemicals may include an upper electrode and an electrical signal measurement circuit. A first chemical and a second chemical may be sequentially applied to the upper electrode. A triboelectrification may be generated between the upper electrode and the first and second chemicals to flow different electrical signals through the upper electrode. The electrical signal measurement circuit may measure the electrical signals to detect the substitution between the first and second chemicals. Thus, the second chemical may be applied to a semiconductor substrate from the substitution timing so that an original function of the second chemical may be maintained without a delay of the time for fabricating a semiconductor device.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING |
| title | SENSORS FOR DETECTING SUBSTITUTION BETWEEN CHEMICALS AND METHODS OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SENSOR |
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