DEFECT INSPECTION DEVICE

The invention includes a pulse oscillated light source, an illumination unit that guides light output from the light source to a sample, a scanning unit that controls a position at which the sample is scanned by the illumination unit, alight converging unit that converges light reflected from the sa...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Makuuchi, Masami, Matsumoto, Shunichi, Honda, Toshifumi, Hamamatsu, Akira, Obara, Nobuhiro
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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