SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME

A method for fabricating a semiconductor device includes: forming a mold stack pattern including a plurality of openings in an upper portion of a substrate and including a mold layer and a supporter layer which are stacked; forming a bottom electrode layer filling the plurality of the openings and c...

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Bibliographische Detailangaben
Hauptverfasser: JANG, Jun-Soo, LEE, Sang-Do, LEE, Jae-Min, PARK, Dong-Su, LEE, Kee-Jeung, LEE, Jeong-Yeop, PARK, Jong-Bum
Format: Patent
Sprache:eng
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