THREE-DIMENSIONAL MEMORY DEVICE CONTAINING EYE-SHAPED CONTACT VIA STRUCTURES LOCATED IN LATERALLY-UNDULATING TRENCHES AND METHOD OF MAKING THE SAME

A three-dimensional memory device includes alternating stacks of insulating layers and electrically conductive layers located over a semiconductor material layer, and memory stack structures extending through one of the alternating stacks. Laterally-undulating backside trenches are present between a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OTSU, Yoshitaka, IWAI, Takaaki, OTOI, Hisakazu
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!