EXTRACTION BODY FOR LITHOGRAPHIC APPARATUS

An extraction body for a support apparatus of a lithographic apparatus. The support apparatus is configured to support an object. The extraction body is formed with an opening at a surface thereof. The opening extends within the extraction body forming a first passageway. The first passageway is con...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WATERSON, Nicholas Peter, RAVENSBERGEN, Simon Karel, CLOOSTERMAN, Vincentius Fransiscus, BALTIS, Coen Hubertus Matheus Matheus, HOUBEN, Martijn, KRAMER, Gijs, TROMP, Siegfried Alexander, GERRITZEN, Justin Johannes Hermanus, VAN DE VIJVER, Yuri Johannes Gabriël, ROSET, Niek Jacobus Johannes, VERMEULEN, Marcus Martinus Petrus Adrianus, LAURENT, Thibault Simon Mathieu
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!