FLOW SENSOR

Reliable flow sensors with enclosures that have predictable thermal variations and reduced mechanical tolerances for a more consistent fluid flow and more consistent flow measurements. Thermal variations can be made predictable by using etched structures in silicon blocks. Mechanical tolerances can...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Abed, Omar, van Sprakelaar, Gertjan, Gaynor, Justin
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL METERING BY VOLUME PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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