ETCHING METAL USING N-HETEROCYCLIC CARBENES

An etchant is described that includes an N-heterocyclic carbene and optionally an appropriate solvent. The etchant was effective at etching a metallic surface having, for example, a metal oxide and/or metal, in both solution phase and vapour-phase. The etchant has been shown to effectively etch oxid...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: BADDELEY, CHRISTOPHER J, ALRASHED, ABRAR R.E, MARIAMPILLAI, BRIAN E, LARREA, CHRISTIAN R, CRUDDEN, CATHLEEN M, HORTON, J. Hugh
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!