FLOW RATE CONTROL DEVICE

A flow rate control device 11 of the invention is comprised with a flow rate adjusting valve 21 that is installed in a flow path 13, a flow rate measurement part 41 that measures a flow rate of a fluid flowing through the flow path 13, a controller 61 that controls opening degrees of the flow rate a...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: KAWAMOTO, Takahiro, SHIMADA, Takuo, TOBIMATSU, Shinji, SEKINE, Tetsuaki
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!