METHODS OF FORMING DEVICES INCLUDING MULTI-PORTION LINERS

A method of forming a semiconductor structure. The method comprises forming a protective portion of a liner on at least a portion of stack structures on a substrate. The protective portion comprises a material formulated to adhere to the stack structures. A conformal portion of the liner is formed o...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Good, Farrell M, Chong, Kyuchul, Vasilyeva, Irina, Bhat, Vishwanath, Campbell, Kyle B
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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