SUSCEPTOR, SUBSTRATE PROCESSING APPARATUS AND PROTECTION METHOD

SUSCEPTOR, SUBSTRATE PROCESSING APPARATUS AND PROTECTION METHOD

A susceptor includes a base; a substrate placing member provided on the base; a bonding layer configured to bond the base and the substrate placing member; and a protection member disposed in a space which an outer peripheral surface of the bonding layer faces and allowed to deactivate a radical whi...

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1. Verfasser: Aoto, Tadashi
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator Aoto, Tadashi
description A susceptor includes a base; a substrate placing member provided on the base; a bonding layer configured to bond the base and the substrate placing member; and a protection member disposed in a space which an outer peripheral surface of the bonding layer faces and allowed to deactivate a radical while having gas permeability.
format Patent
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title SUSCEPTOR, SUBSTRATE PROCESSING APPARATUS AND PROTECTION METHOD
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