PELLICLE AND PELLICLE ASSEMBLY

A pellicle assembly is disclosed that has a pellicle frame defining a surface onto which a pellicle is to be attached. The pellicle assembly includes one or more three-dimensional expansion structures that allow the pellicle to expand under stress. There is also disclosed a pellicle assembly for a p...

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Hauptverfasser:	ZDRAVKOV, Aleksandar Nikolov, JANSSEN, Paul, MEIJER, Marcel Peter, VAN DEN EINDEN, Wilhelmus Theodorus Anthonius Johannes, NOTENBOOM, Arnoud Willem, KLOOTWIJK, Johan Flendrik, PATEL, Hrishikesh, VAN DER ZANDE, Willem Joan, OLSMAN, Raymond, KURGANOVA, Evgenia, WONDERGEM, Hendrikus Jan, PETER, Maria, JANSSEN, Johannes Joseph, VAN DEN BOSCH, Gerrit, DE GROOT, Antonius Franciscus Johannes, NASALEVICH, Maxim Aleksandrovich, VLES, David Ferdinand, VAN ZWOL, Pieter-Jan, GIESBERS, Adrianus Johannes Maria, VERMEULEN, Johannes Petrus Martinus Bernardus, MEIJERINK, Wouter Rogier, ANDE, Chaitanya Krishna, KNAPEN, Peter Simon Antonius, VOORTHUIJZEN, Willem-Pieter
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	A pellicle assembly is disclosed that has a pellicle frame defining a surface onto which a pellicle is to be attached. The pellicle assembly includes one or more three-dimensional expansion structures that allow the pellicle to expand under stress. There is also disclosed a pellicle assembly for a patterning device, the pellicle assembly including one or more actuators for moving the pellicle assembly towards and way from the patterning device.