MICROELECTRONIC DEVICE WITH A MEMORY ELEMENT UTILIZING STACKED VERTICAL DEVICES

An embodiment may include a method of forming a microelectronic device. The method may include forming a pair of transistors stacked vertically and connected in series, each of the pair of transistors are of the same type. The method may include forming a memory element including a first inverter co...

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Bibliographische Detailangaben
Hauptverfasser: PILLE, Juergen, SAUTTER, Rolf, WERNER, Tobias, FRISCH, Albert, WENDEL, Dieter
Format: Patent
Sprache:eng
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Zusammenfassung:An embodiment may include a method of forming a microelectronic device. The method may include forming a pair of transistors stacked vertically and connected in series, each of the pair of transistors are of the same type. The method may include forming a memory element including a first inverter containing a first inverter transistor and an access transistor. The first inverter transistor is connected to a power supply rail. The access transistor is connected to a bitline. The first inverter transistor is a first transistor of the pair of vertically stacked transistors and the access transistor is a second transistor of the pair of vertically stacked transistors. The pair of transistors are arranged substantially perpendicular to the plurality of layers.