MULTI-TIER THREE-DIMENSIONAL MEMORY DEVICE WITH DIELECTRIC SUPPORT PILLARS AND METHODS FOR MAKING THE SAME

A multi-tier three-dimensional memory array includes multiple alternating stacks of insulating layers and electrically conductive layers that are vertically stacked. Memory stack structures including memory films and semiconductor channels extend through the alternating stacks. The alternating stack...

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Bibliographische Detailangaben

Hauptverfasser:	CHEN, Zhiwei, HOJO, Naoto, OTSU, Yoshitaka, NOZAWA, Kei, ITO, Koichi, EHARA, Ryoichi, DODA, Yashushi, KAWAMURA, Takeshi, TANAKA, Yoshinobu, IKAWA, Yusuke
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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